Implementing green manufacturing, as the first step towards sustainable production, has been growing in interest and importance over the last few years. The opportunities for developing advanced manufacturing capabilities while, at the same time, reducing the impact of manufacturing on energy use, water and resource consumption and, overall, green house gas emissions and carbon footprint are numerous. This paper reviews the background, vocabulary and motivation for green manufacturing and highlights the competitive opportunities for manufacturers who embrace, seriously, this growing movement. The terms "green" and "sustainable" are defined in a manufacturing context, metrics and tools for assessing manufacturing are described, and some concrete examples of how to begin and what are others doing are given. Some of the future directions of green manufacturing are discussed.

The past years have seen emphasis on increasing the quality of machined workpieces while at the same time reducing the cost per piece. Accompanying this is the decreasing size and increasing complexity of workpieces. This has put continual pressure on improvements in the machining process in terms of new processes, new tooling and tool materials, and new machine tools. This often falls under the terminology of High Performance Cutting (HPC) — the theme of this conference. A recent CIRP keynote /1/ outlined and explained some of these drivers for enhancement in machining technology. Fundamental to this continual improvement is understanding edge finishing of machined components, specially burrs. Deburring, like inspection, is a non-productive operation and, as such, should be eliminated or minimized to the greatest extent possible. nderstanding of the fundamentals of burr formation leads us to procedures for preventing or, at least, minimizing, burr formation. This depends on analytical models of burr formation, studies of tool/workpiece interaction for understanding the creation of burrs and, specially, the material influence, data bases describing cutting conditions for optimal edge quality, and design rules for burr prevention as well as standard terminology for describing edge features and burrs. Ultimately, engineering software tools must be available so that design and manufacturing engineers can use this knowledge interactively in their tasks to yield a mechanical part whose design and production is optimized for burr prevention along with the other critical specifications. This paper reviews recent work done in all these areas with an emphasis on research at the University of California at Berkeley.

Today the requirements for reducing the impact of our manufacturing activities are increasing as the world awakes to and addresses the environmental impacts of our society. Energy consumption, greenhouse gas emissions, materials availability and use, environmental impact levels, etc. are all topics of interest. Semiconductor manufacturing in general and process steps such as CMP are not exempt from this and, in many cases, the industry has led the efforts in reducing impacts. This paper will first review some of the drivers for sustainable manufacturing, then define some of the terms that will be useful for determining the engineering aspects of sustainability and sustainable manufacturing, as well as metrics for assessing the impact of manufacturing in general and CMP in particular. An assessments of CMP will be given to illustrate the potential for “design for the environment” in CMP and related processes. Consideration will be given to research opportunities, including process modeling, that this focus provides to CMP researchers, consumable suppliers and industry.

Efficient and cost-effective manufacturing methods are needed for the widespread adoption of microfluidic devices. This paper focuses on the roller imprinting process, which is a new method for fabricating microfluidic devices. In this process, a cylindrical roll with raised features on its surface creates imprints by rolling over a fixed workpiece substrate and mechanically deforming it. Imprint precision is a function of the imprint roll features, the substrate material, and process parameters. This paper presents an analysis of the effects of process variables on the imprint using finite element (FE) simulations of the roller imprinting process.

Micro-end-milling is emerging as an important fabrication process. Its benefits include the ability to fabricate micro and meso-scale parts out of a greater range of materials and with more varied geometry than is possible with lithography and etching. It also enables the creation of micro and meso-scale molds for injection molding. Factors affecting surface roughness have not been studied in depth for this process. A series of experiments has been conducted in order to begin to characterize the factors affecting surface roughness and determine the range of attainable surface roughness values for the micro-end-milling process. A 229 ?m diameter end mill was used to cut slots into aluminum (6061) samples. The machining factors studied were chip load (feed per tooth), cutting speed, and depth of cut. A two level factorial experiment was run, and it was determined that while chip load was the dominating factor, the interaction between chip load and cutting speed was also significant. Further experiments allowed the generation of a second order relationship between chip load and surface roughness. The model, which includes the effect of chip load, cutting speed, and the interaction between the two, predicted the surface roughness values with an accuracy of about +/- 10%. The surface roughness values ranged from 600 Å all the way to 3800 Å over the span of the studied parameters.

It has previously been shown that run-out creates a greater problem for the dimensional accuracy of parts created by a micro-end-milling process as compared to parts created by a traditional end-milling process (Lee, et al 2001). It appears that run-out also has a more significant effect on the surface quality of micro-end milled parts. The surface roughness traces reveal large peak to valley variations with a period of twice the chip load. This means that one of the two cutting edges on the tool creates a deeper cut than the other. Cutting marks from the non-dominant cutting edge are also visible on the surface roughness traces as small steps between the much larger marks from the dominant cutting edge. It is postulated that the effect is due to run-out, and that improving machine tool run-out will have a very significant effect on the surface quality of micro-end-milled features.

A new chip scale model integrating pad height distribution and it’s interaction with topography on a patterned wafer was tested. Pad asperity height distribution was used to calculate mean contact pressure at a single asperity contact region. Material removal by a single asperity was evaluated from Hertzian elastic contact model and abrasive indentation model. Simulation on a test pattern predicted relatively higher removal rate and lower planarization efficiency with higher nominal down pressure. Oxide thickness variation over a test chip for a time period measured from specially designed test structure matched well with the model prediction.

All process elements of a reconfigurable manufacturing system should accommodate future changes. This paper looks at one such process element, tool paths, with focus on face milling and pocket milling. Tool paths for the first part are designed to optimize the process outcomes for the initial constraints. Change in market conditions or part design leading to change in cycle time requirements, geometry or complexity of the part, are met using incremental tool paths. Changes in cycle time are achieved by changing the feedrate and tool diameter. Changes in part design are tackled by modifying tool path segments. This system would provide a quick turn around time, less testing and quicker ramp up.