Today the requirements for reducing the impact of our manufacturing activities are increasing as the world awakes to and addresses the environmental impacts of our society. Energy consumption, greenhouse gas emissions, materials availability and use, environmental impact levels, etc. are all topics of interest. Semiconductor manufacturing in general and process steps such as CMP are not exempt from this and, in many cases, the industry has led the efforts in reducing impacts. This paper will first review some of the drivers for sustainable manufacturing, then define some of the terms that will be useful for determining the engineering aspects of sustainability and sustainable manufacturing, as well as metrics for assessing the impact of manufacturing in general and CMP in particular. An assessments of CMP will be given to illustrate the potential for “design for the environment” in CMP and related processes. Consideration will be given to research opportunities, including process modeling, that this focus provides to CMP researchers, consumable suppliers and industry.

The past years have seen emphasis on increasing the quality of machined workpieces while at the same time reducing the cost per piece. Accompanying this is the decreasing size and increasing complexity of workpieces. This has put continual pressure on improvements in the machining process in terms of new processes, new tooling and tool materials, and new machine tools. This often falls under the terminology of High Performance Cutting (HPC) — the theme of this conference. A recent CIRP keynote /1/ outlined and explained some of these drivers for enhancement in machining technology. Fundamental to this continual improvement is understanding edge finishing of machined components, specially burrs. Deburring, like inspection, is a non-productive operation and, as such, should be eliminated or minimized to the greatest extent possible. nderstanding of the fundamentals of burr formation leads us to procedures for preventing or, at least, minimizing, burr formation. This depends on analytical models of burr formation, studies of tool/workpiece interaction for understanding the creation of burrs and, specially, the material influence, data bases describing cutting conditions for optimal edge quality, and design rules for burr prevention as well as standard terminology for describing edge features and burrs. Ultimately, engineering software tools must be available so that design and manufacturing engineers can use this knowledge interactively in their tasks to yield a mechanical part whose design and production is optimized for burr prevention along with the other critical specifications. This paper reviews recent work done in all these areas with an emphasis on research at the University of California at Berkeley.

Implementing green manufacturing, as the first step towards sustainable production, has been growing in interest and importance over the last few years. The opportunities for developing advanced manufacturing capabilities while, at the same time, reducing the impact of manufacturing on energy use, water and resource consumption and, overall, green house gas emissions and carbon footprint are numerous. This paper reviews the background, vocabulary and motivation for green manufacturing and highlights the competitive opportunities for manufacturers who embrace, seriously, this growing movement. The terms "green" and "sustainable" are defined in a manufacturing context, metrics and tools for assessing manufacturing are described, and some concrete examples of how to begin and what are others doing are given. Some of the future directions of green manufacturing are discussed.

Machining dry, without any coolant can be advantageous because of decreased costs associated with the use of coolant and a decrease in possible negative effects on worker health and the environment. Many problems associated with dry machining occur because of elevated temperatures. Because of increased ductility at elevated temperatures, the burrs formed are larger.

A material removal rate (MRR) model as a function of abrasive weight concentration has been proposed by extending a material removal model developed earlier [1-2]. With an increase of the weight concentration of abrasives/MRR, three regions of material removal exist: first, a chemically dominant and rapid increasing region, whose range is determined by the generation/passivation rate and hardness of the surface passivation layer, second, a mechanically dominant linear region, where the material removal is proportional to the weight concentration, and third, a mechanical dominant saturation region, where the material removal saturates because the total contact area is fully occupied by the abrasives. The passive layer of the wafer surface is proposed to be a bi-layer structure. In the first part of this paper, a detailed model is proposed to explain that the transition from the first to the second region is due to a transition from a wafer surface covered with a single soft material to a surface covered with both soft and hard materials. The chemicals contribute to the material removal through the generation rate of the upper softer layer of the passive films. The slope of the linear region is a function of abrasive size distribution, and the saturation removal rate is a function of abrasive size distribution and wafer-pad contact area. These are supported by experimental results to be discussed in the second part of this paper [39]. The model can help to clarify the roles of chemicals, wafer-pad contact area and abrasive size distribution in chemical mechanical polishing.

High speed machining is pushing the limits of feeds and speeds. A different approach for high throughput is described here. The focus is on the maximum feed that can be obtained for a segment; the feed rate losses due to sharp changes in tool path are minimized. The interdependency of individual axis drive speeds for a tool path segment are analyzed. There exists an optimum work angle relative to the axes that reduces losses and increases allowable feeds for particular segments, saving valuable cycle time and balancing feed drive loads. Face milling and roughing steps of end milling are the most attractive application areas.

Accurate models of twist drills are needed for Finite Element simulations of the drilling process. Existing drill designing methods rely extensively on discretized analytical equations to describe the drill and different sets of equations need to be formulated as the drill design changes. This paper presents a method to create accurate models of two-flute conical twist drills using solid-modeling techniques which addresses some of these shortcomings. Boolean operations are used to mimic the drill manufacturing steps and generate the fully designed drill. The drills generated by this method have been used in Finite Element simulations to study the effect of drill point geometry on burr formation in drilling.