- Luo, Qing;
- Cheng, Yan;
- Yang, Jianguo;
- Cao, Rongrong;
- Ma, Haili;
- Yang, Yang;
- Huang, Rong;
- Wei, Wei;
- Zheng, Yonghui;
- Gong, Tiancheng;
- Yu, Jie;
- Xu, Xiaoxin;
- Yuan, Peng;
- Li, Xiaoyan;
- Tai, Lu;
- Yu, Haoran;
- Shang, Dashan;
- Liu, Qi;
- Yu, Bing;
- Ren, Qiwei;
- Lv, Hangbing;
- Liu, Ming
Memory devices with high speed and high density are highly desired to address the 'memory wall' issue. Here we demonstrated a highly scalable, three-dimensional stackable ferroelectric diode, with its rectifying polarity modulated by the polarization reversal of Hf0.5Zr0.5O2 films. By visualizing the hafnium/zirconium lattice order and oxygen lattice order with atomic-resolution spherical aberration-corrected STEM, we revealed the correlation between the spontaneous polarization of Hf0.5Zr0.5O2 film and the displacement of oxygen atom, thus unambiguously identified the non-centrosymmetric Pca21 orthorhombic phase in Hf0.5Zr0.5O2 film. We further implemented this ferroelectric diode in an 8 layers 3D array. Operation speed as high as 20 ns and robust endurance of more than 109 were demonstrated. The built-in nonlinearity of more than 100 guarantees its self-selective property that eliminates the need for external selectors to suppress the leakage current in large array. This work opens up new opportunities for future memory hierarchy evolution.