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Scholarly Works (2 results)

Article

Design Rules for the Development of a New-Concept Pad

Hwang, Inkil;
Dornfeld, David A

Precision Manufacturing Group (2003)

In order to address new concerns in the CMP process, a new-concept pad with a composite structure and controlled geometries is proposed.

Cover page: Design Rules for the Development of a New-Concept Pad

Article

MEMS Applications of CMP

Hwang, Inkil;
Dornfeld, David A

Precision Manufacturing Group (2003)

In order to keep pace with tight designs for MEMS, CMP has started to be adopted. In this report, some MEMS devices fabricated with CMP are shown, and some possible areas in which CMP can make contribution to are suggested.