This paper reports a low-frequency piezoelectric micromachined ultrasonic transducer (pMUT) with a small attenuation coefficient to realize the long-distance range finding applications in air. Pulse-detection measurements of one pair of pMUT devices show a >6-meter traveling distance in air under a 37.32 kHz driving frequency. As an example, two pMUT chips are mounted on two drones as the transceiver and receiver, respectively. Measurements of the separation distance are conducted based on the time-of-flight (ToF) principle with up to 32 fps (frames per second) for real-time detections. This demo of drone-mounted pMUT system illustrates the advantages of pMUT in terms of compactness and low power consumption for applications in drones including obstacle avoidance, inter collision prevention, aerial coordination, and acoustic-based vision.

This work reports an engineered platform for the non-contact haptic stimulation on human skins by means of an array of piezoelectric micromachined ultrasonic transducer (pMUT) via the beamforming scheme. Compared to the state-of-art reports, three distinctive achievements have been demonstrated: (1) individual single pMUT unit based on lithium niobate (LN) with measured high SPL (sound pressure level) of 133 dB at 2 mm away; (2) a beamforming scheme simulated and experimentally proved to generate ∼2.3x higher pressure near the focal point; and (3) the combination of auto-positioning and haptic stimulations on volunteers with the smallest reported physical device size to achieve haptic sensations. As such, this work could have practical applications in the broad areas to stimulate haptic sensations, such as AR (Augmented Reality), VR (Virtual Reality), and robotics.

This work presents an air-coupled piezoelectric micromachined ultrasonic transducer (pMUT) with high transmitting acoustic pressure by using sputtered potassium sodium niobate (K,Na)NbO3 (KNN) thin film with a high piezoelectric coefficient (e31 ∼ 8-10 C/m2) and low dielectric constant (ϵr ∼ 260-300) for the first time. The fabricated KNN pMUT with a resonant frequency at 104.5 kHz has been tested to exhibit unprecedented results: (1) high sound pressure level (SPL) of 109 dB/V at a distance of 10 cm, which is 8 times higher than that of AlN-based pMUTs at a similar frequency; (2) low-voltage operation of only 4 volts peak-to-peak amplitude (Vp-p); and (3) good receiving sensitivity. As such, this work presents a new class of high-SPL and low-driving-voltage pMUTs for potential applications in various fields, including consumer electronics, such as but not limited to haptic feedback, loudspeaker, and AR/VR systems.

This work presents a continuous volumetric indoor air temperature measurement scheme using PMUTs (piezoelectric micromachined ultrasonic transducers). Advancements as compared to state-of-art works include: (1) 'volumetric' temperature monitoring instead traditional 'pointwise' temperature information; (2) accurate temperature readings spanning an operational distance of 5 m as validated by a commercial thermometer for 3 days; and (3) capable of detecting global average temperature and local temperature events by installing networked/grid PMUT pairs. This innovative sensing technique could be applicable for the precision control of future building/living environments.

This paper reports a 9-meter-long ultrasonic 3D detector based on a packaged lithium niobate PMUTs (piezoelectric micromachined ultrasonic transducers). Compared with the state-of-the-art reports, three distinctive achievements have been demonstrated: (1) high uniformity and wide bandwidth PMUTs by optimized package designs for highly efficient ultrasonic energy transfer; (2) a long-range receiving beamforming detection scheme on a 4×4 PMUT array for up to 9 m detection rang - comparable to the longest reported range via PMUTs; and (3) 3D detection of multiple static/moving objects with the field of view exceeding 50°. As such, this device is valuable for various applications such as obstacle avoidance when both low power consumption and small form factor are desirable, including aerial drones.