This letter reports an efficient and compatible silicon membrane combining the physical properties of nanospikes and microchannel arrays for mechanical cell lysis. This hierarchical silicon nanospikes membrane was created to mechanically disrupt cells for a rapid process with high throughput, and it can be assembled with commercial syringe filter holders. The membrane was fabricated by photoelectrochemical overetching to form ultrasharp nanospikes in situ along the edges of the microchannel arrays. The intracellular protein and nucleic acid concentrations obtained using the proposed membrane within a short period of time were quantitatively higher than those obtained by routine, conventional acoustic and chemical lysis methods.