Dopant and self-diffusion in extrinsic n-type silicon isotopically controlled heterostructures
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Dopant and self-diffusion in extrinsic n-type silicon isotopically controlled heterostructures

  • Author(s): Silvestri, Hughes H.
  • Sharp, Ian D.
  • Bracht, Hartmut A.
  • Nicols, Sam P.
  • Beeman, Jeff W.
  • Hansen, John
  • Nylandsted-Larsen, Arme
  • Haller, Eugene E.
  • et al.
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