Skip to main content
Open Access Publications from the University of California
Search eScholarship
Refine Search
All of eScholarship
This Series
Physical Sciences
Lawrence Berkeley National Laboratory
Deposit
Manage
Submissions
Menu
Unit Home
Policies
Contact us
eScholarship
Lawrence Berkeley National Laboratory
Physical Sciences
Engineering
Download PDF
Main
PDF
Share
Email
Facebook
Development of a standalone zoneplate based EUV mask defect review tool
2022
Perera, Chami
;
Yoon, Gi Sung
;
Carlson, Ryan
;
Yang, Baorui
;
Hermes, Mike
;
Houser, Dave
;
Khodarev, Alexander
;
Murray, Chuck
;
Grodt, Travis
;
Allézy, Arnaud
;
Chao, Weilun
;
Salmassi, Farhad
;
Gullikson, Eric
;
Naulleau, Patrick
Editor(s):
Lio, Anna
;
Burkhardt, Martin
et al.
Published Web Location
https://doi.org/10.1117/12.2617277
...
Main Content
Metrics
Author & Article Info
Top