- Desai, Sujay B;
- Madhvapathy, Surabhi R;
- Sachid, Angada B;
- Llinas, Juan Pablo;
- Wang, Qingxiao;
- Ahn, Geun Ho;
- Pitner, Gregory;
- Kim, Moon J;
- Bokor, Jeffrey;
- Hu, Chenming;
- Wong, H-S Philip;
- Javey, Ali
Scaling of silicon (Si) transistors is predicted to fail below 5-nanometer (nm) gate lengths because of severe short channel effects. As an alternative to Si, certain layered semiconductors are attractive for their atomically uniform thickness down to a monolayer, lower dielectric constants, larger band gaps, and heavier carrier effective mass. Here, we demonstrate molybdenum disulfide (MoS2) transistors with a 1-nm physical gate length using a single-walled carbon nanotube as the gate electrode. These ultrashort devices exhibit excellent switching characteristics with near ideal subthreshold swing of ~65 millivolts per decade and an On/Off current ratio of ~106 Simulations show an effective channel length of ~3.9 nm in the Off state and ~1 nm in the On state.