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Single ion implantation with scanning probe alignment

  • Author(s): Persaud, A.
  • Allen, F.I.
  • Gicquel, F.
  • Park, S.J.
  • Liddle, J.A.
  • Schenkel, T.
  • Ivanov, Tzv.
  • Ivanova, K.
  • Rangelow, I.W.
  • Bokor, J.
  • et al.
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