UC Berkeley

Chemiresistive gas sensors based on semiconductor metal oxides, such as tin dioxide (SnO₂), are indispensable for detecting and monitoring toxic gases and pollutants, making them critical components in industrial and environmental applications. To enhance their performance, the metal oxides are loaded with noble metals such as palladium (Pd). However, ambient humidity poses a significant challenge to their performance. The presence of adsorbed water molecules on the oxide surface can considerably impair sensor sensitivity and overall performance. To address this issue, in this paper, we report on the application of an ultrathin, hydrophobic layer of hexamethyldisilazane to the surface of a Pd/SnO2 sensor. This study investigates the influence of hydrophobic surface modifications on the metal oxide interface, focusing on their impact on sensor sensitivity and selectivity. The resulting sensor exhibits superior hydrogen sensing capabilities, operating effectively at low temperatures even in high humidity environments. Furthermore, the hydrophobic modification reduces the sensor’s susceptibility to interfering gases, thus enhancing its selectivity. The combined enhancements in moisture resistance and selectivity achieved through HMDS surface modification, along with the superior sensitivity of Pd/SnO₂ sensors, facilitate the development of gas sensors with enhanced humidity tolerance and broader applications.