Laboratory for Manufacturing and Sustainability

Parent: UC Berkeley

eScholarship stats: History by Item for March through June, 2026

ItemTitleTotal requests2026-062026-052026-042026-03
1sc2k1b8Burrs—Analysis, control and removal639179157159144
4hw2r7qcMaterial Removal Mechanisms in Lapping and Polishing53399110149175
4h56k1chAdvanced monitoring of machining operations531119184123105
2239m1nsStrategies for Preventing and Minimizing Burr Formation485120135130100
29g1z2t6Wafer-Scale CMP Modeling of With-in Wafer Non-Uniformity407999912683
0gv882qkComparing Environmental Impacts of Additive Manufacturing vs. Traditional Machining via Life-Cycle Assessment390881299974
7hd8r1ftAdvancing Cutting Technology362699512969
08k854nqDevelopment of a micro-drilling burr-control chart for PCB drilling343628872121
26q3w4bcAn Environmental and Economic Trade-off Analysis of Manufacturing Process Chains to Inform Decision Making for Sustainability34078929773
8260n3t5A Review of Engineering Research in Sustainable Manufacturing33189907379
3wk862xbChip Scale Prediction of Nitride Erosion in High Selectivity STI CMP308666910271
9xg0g32gFinite Element Modeling of Drilling Using DEFORM30660978069
4ct2n4jhReview of Chemical-Mechanical Planarization Modeling for Integrated Circuit Fabrication: From Particle Scale to Die and Wafer Scales27570797551
7xx6j4s5Effect of Ceria Abrasives on Planarization Efficiency in STI CMP Process27170626970
80p3d1trEnergy Use per Worker-Hour: Evaluating the Contribution of Labor to Manufacturing Energy Use26333538394
8rf718jmRecent Advances in Mechanical Micromachining26177536566
6bd3c6bwTowards Energy and Resource Efficient Manufacturing: A Processes and Systems Approach25646777360
8390918mThe engineering design process as a problem solving and learning tool in K-12 classrooms25164587257
4w89d0m2Integrated Sustainability Analysis of Atomic Layer Deposition for Microelectronics Manufacturing249551005737
5tp0299mPrecision Manufacturing Process Monitoring With Acoustic Emission24658796247
0zz4s5qbBurrs-Analysis, control and removal23735947137
21z1z935Micro Deburring Technology Using Ultrasonic Vibration with Abrasive23265615056
40g995w6Energy Consumption Characterization and Reduction Strategies for Milling Machine Tool Use22843805253
0330g886A Decision-Based Analysis of Compressed Air Usage Patterns in Automotive Manufacturing22641795947
0n2575s1Material Removal Regions in Chemical Mechanical Polishing: Coupling Effects of Slurry Chemicals, Abrasive Size Distribution and Wafer-Pad Contact Area, Part 122247567445
9nr6b6jrSemi-empirical material removal rate distribution model for&nbsp;SiO<sub>2</sub>&nbsp;chemical mechanical polishing (CMP) processes21537625363
51r6b592A Study of Surface Roughness in the Micro-End-Milling Process21425626760
0838n3x9Micro-Burr Formation and Minimization through Process Control21141545957
1cq5k23bDevelopment of an Analytical Model for Drilling Burr Formation in Ductile Materials21157686125
8cw4n2tfComparative Study of Finite Element Simulation Software20766494151
9tj3t93zEvaluating the End-of-Life Phase of Consumer Electronics:Methods and Tools to Improve Product Design and Material Recovery20222724860
15v2q84kAutomated Drill Modeling for Drilling Process Simulation20133496851
2wr9b3t1Life-cycle assessment of NAND flash memory20128556157
2jv2x7wnMicromachining and Burr Formation for Precision Mechanical Components20047655434
1px50107On The Face Milling Burr Formation Mechanisms and Minimization Strategies at High Tool Engagement19936565750
5fj0343sQuantifying the Improvements in Rapid Prototyping and Product Life Cycle Performance Created by Machining19943654843
7931209fA Hybrid Life Cycle Inventory of Nano-Scale Semiconductor Manufacturing19946594450
12b238cdOn the Shrinkage and Stiffening of a Cellulose Sponge upon Drying19540704639
00s0d8v2Precision Manufacturing of Imprint Rolls for the Roller Imprinting Process19424865034
06r4m8j8Metrics for Sustainable Manufacturing19322598824
9zp430wpReview of the Impacts of Crumb Rubber in Artificial Turf Applications19232615544
58r5204tMulti-Sensor Monitoring System in Chemical Mechanical Planarization (CMP) for Correlations with Process Issues18937506339
412734jpA Review of Burr Formation in Machining18644554641
6p80t3gcTool Path Planning Generation For Finish Machining of Freeform Surfaces in the Cybercut Process Planning Pipeline18522576145
1m17m8xhAn Experimental Investigation on the Influence of Process Parameters During Chip Formation18436745420
1kj2b95jCMP Modeling as a part of Design for Manufacturing18342545136
9ct6f6d2Environmental Analysis of Milling Machine Tool Use in Various Manufacturing Environments18240415744
5bq7d5qgBack Cutting and Tool Wear Influence on Burrs in Face Milling - Analysis and Solutions18038575233
0pn4r425Copper CMP Modeling: Millisecond Scale Adsorption Kinetics of BTA in Glycine-Containing Solutions at pH 417850366329
1387x8h9Software-based tool path evaluation for environmental sustainability17630734132

Note: Due to the evolving nature of web traffic, the data presented here should be considered approximate and subject to revision. Learn more.