The dynamics of cascaded-order Brillouin lasers make them ideal for applications such as rotation sensing, highly coherent optical communications, and low-noise microwave signal synthesis. Remark- ably, when implemented at the chip-scale, recent experimental studies have revealed that Brillouin lasers can operate in the fundamental linewidth regime where optomechanical and quantum noise sources dominate. To explore new opportunities for enhanced performance, we formulate a simple model to describe the physics of cascaded Brillouin lasers based on the coupled mode dynamics governed by electrostriction and the fluctuation-dissipation theorem. From this model, we obtain analytical formulas describing the steady state power evolution and accompanying noise properties, including expressions for phase noise, relative intensity noise and power spectra for beat notes of cascaded laser orders. Our analysis reveals that cascading modifies the dynamics of intermediate laser orders, yielding noise properties that differ from single-mode Brillouin lasers. These modifications lead to a Stokes order linewidth dependency on the coupled order dynamics and a broader linewidth than that predicted with previous single order theories. We also derive a simple analytical expression for the higher order beat notes that enables calculation of the Stokes linewidth based on only the relative measured powers between orders instead of absolute parameters, yielding a method to measure cascaded order linewidth as well as a prediction for sub-Hz operation. We validate our results using stochastic numerical simulations of the cascaded laser dynamics.

High quality-factor (Q) optical resonators are a key component for ultra-narrow linewidth lasers, frequency stabilization, precision spectroscopy and quantum applications. Integration in a photonic waveguide platform is key to reducing cost, size, power and sensitivity to environmental disturbances. However, to date, the Q of all-waveguide resonators has been relegated to below 260 Million. Here, we report a Si3N4 resonator with 422 Million intrinsic and 3.4 Billion absorption-limited Qs. The resonator has 453 kHz intrinsic, 906 kHz loaded, and 57 kHz absorption-limited linewidths and the corresponding 0.060 dB m−1 loss is the lowest reported to date for waveguides with deposited oxide upper cladding. These results are achieved through a careful reduction of scattering and absorption losses that we simulate, quantify and correlate to measurements. This advancement in waveguide resonator technology paves the way to all-waveguide Billion Q cavities for applications including nonlinear optics, atomic clocks, quantum photonics and high-capacity fiber communications.

We demonstrate 0.034 dB/m loss waveguides in a 200-mm wafer-scale, silicon nitride (Si₃N₄) CMOS-foundry-compatible integration platform. We fabricate resonators that measure up to a 720 million intrinsic Q resonator at 1615 nm wavelength with a 258 kHz intrinsic linewidth. This resonator is used to realize a Brillouin laser with an energy-efficient 380 µW threshold power. The performance is achieved by reducing scattering losses through a combination of single-mode TM waveguide design and an etched blanket-layer low-pressure chemical vapor deposition (LPCVD) 80 nm Si₃N₄ waveguide core combined with thermal oxide lower and tetraethoxysilane plasma-enhanced chemical vapor deposition (TEOS-PECVD) upper oxide cladding. This level of performance will enable photon preservation and energy-efficient generation of the spectrally pure light needed for photonic integration of a wide range of future precision scientific applications, including quantum, precision metrology, and optical atomic clocks.

High quality-factor (Q) optical resonators are a key component for ultra-narrow linewidth lasers, frequency stabilization, precision spectroscopy and quantum applications. Integration in a photonic waveguide platform is key to reducing cost, size, power and sensitivity to environmental disturbances. However, to date, the Q of all-waveguide resonators has been relegated to below 260 Million. Here, we report a Si₃N₄ resonator with 422 Million intrinsic and 3.4 Billion absorption-limited Qs. The resonator has 453 kHz intrinsic, 906 kHz loaded, and 57 kHz absorption-limited linewidths and the corresponding 0.060 dB m^-1 loss is the lowest reported to date for waveguides with deposited oxide upper cladding. These results are achieved through a careful reduction of scattering and absorption losses that we simulate, quantify and correlate to measurements. This advancement in waveguide resonator technology paves the way to all-waveguide Billion Q cavities for applications including nonlinear optics, atomic clocks, quantum photonics and high-capacity fiber communications.

Optical frequency stabilization is a critical component for precision scientific systems including quantum sensing, precision metrology, and atomic timekeeping. Ultra-high quality factor photonic integrated optical resonators are a prime candidate for reducing their size, weight and cost as well as moving these systems on chip. However, integrated resonators suffer from temperature-dependent resonance drift due to the large thermal response as well as sensitivity to external environmental perturbations. Suppression of the cavity resonance drift can be achieved using precision interrogation of the cavity temperature through the dual-mode optical thermometry. This approach enables measurement of the cavity temperature change by detecting the resonance difference shift between two polarization or optical frequency modes. Yet this approach has to date only been demonstrated in bulk-optic whispering gallery mode and fiber resonators. In this paper, we implement dual-mode optical thermometry using dual polarization modes in a silicon nitride waveguide resonator for the first time, to the best of our knowledge. The temperature responsivity and sensitivity of the dual-mode TE/TM resonance difference is 180.7$\pm$2.5 MHz/K and 82.56 $\mu$K, respectively, in a silicon nitride resonator with a 179.9E6 intrinsic TM mode Q factor and a 26.6E6 intrinsic TE mode Q factor. Frequency stabilization is demonstrated by locking a laser to the TM mode cavity resonance and applying the dual-mode resonance difference to a feedforward laser frequency drift correction circuit with a drift rate improvement to 0.31 kHz/s over the uncompensated 10.03 kHz/s drift rate. Allan deviation measurements with dual-mode feedforward-correction engaged shows that a fractional frequency instability of 9.6E-11 over 77 s can be achieved.

Narrow linewidth visible light lasers are critical for atomic, molecular and optical (AMO) applications including atomic clocks, quantum computing, atomic and molecular spectroscopy, and sensing. Historically, such lasers are implemented at the tabletop scale, using semiconductor lasers stabilized to large optical reference cavities. Photonic integration of high spectral-purity visible light sources will enable experiments to increase in complexity and scale. Stimulated Brillouin scattering (SBS) is a promising approach to realize highly coherent on-chip visible light laser emission. While progress has been made on integrated SBS lasers at telecommunications wavelengths, barriers have existed to translate this performance to the visible, namely the realization of Brillouin-active waveguides in ultra-low optical loss photonics. We have overcome this barrier, demonstrating the first visible light photonic integrated SBS laser, which operates at 674 nm to address the 88Sr+ optical clock transition. To guide the laser design, we use a combination of multi-physics simulation and Brillouin spectroscopy in a 2 meter spiral waveguide to identify the 25.110 GHz first order Stokes frequency shift and 290 MHz gain bandwidth. The laser is implemented in an 8.9 mm radius silicon nitride all-waveguide resonator with 1.09 dB per meter loss and Q of 55.4 Million. Lasing is demonstrated, with an on-chip 14.7 mW threshold, a 45% slope efficiency, and linewidth narrowing as the pump is increased from below threshold to 269 Hz. To illustrate the wavelength flexibility of this design, we also demonstrate lasing at 698 nm, the wavelength for the optical clock transition in neutral strontium. This demonstration of a waveguide-based, photonic integrated SBS laser that operates in the visible, and the reduced size and sensitivity to environmental disturbances, shows promise for diverse AMO applications.

Narrow linewidth visible light lasers are critical for atomic, molecular and optical (AMO) physics including atomic clocks, quantum computing, atomic and molecular spectroscopy, and sensing. Stimulated Brillouin scattering (SBS) is a promising approach to realize highly coherent on-chip visible light laser emission. Here we report demonstration of a visible light photonic integrated Brillouin laser, with emission at 674 nm, a 14.7 mW optical threshold, corresponding to a threshold density of 4.92 mW μm^-2, and a 269 Hz linewidth. Significant advances in visible light silicon nitride/silica all-waveguide resonators are achieved to overcome barriers to SBS in the visible, including 1 dB/meter waveguide losses, 55.4 million quality factor (Q), and measurement of the 25.110 GHz Stokes frequency shift and 290 MHz gain bandwidth. This advancement in integrated ultra-narrow linewidth visible wavelength SBS lasers opens the door to compact quantum and atomic systems and implementation of increasingly complex AMO based physics and experiments.

Lasers with hertz linewidths at time scales of seconds are critical for metrology, timekeeping, and manipulation of quantum systems. Such frequency stability relies on bulk-optic lasers and reference cavities, where increased size is leveraged to reduce noise but with the trade-off of cost, hand assembly, and limited applications. Alternatively, planar waveguide-based lasers enjoy complementary metal-oxide semiconductor scalability yet are fundamentally limited from achieving hertz linewidths by stochastic noise and thermal sensitivity. In this work, we demonstrate a laser system with a 1-s linewidth of 1.1 Hz and fractional frequency instability below 10^-14 to 1 s. This low-noise performance leverages integrated lasers together with an 8-ml vacuum-gap cavity using microfabricated mirrors. All critical components are lithographically defined on planar substrates, holding potential for high-volume manufacturing. Consequently, this work provides an important advance toward compact lasers with hertz linewidths for portable optical clocks, radio frequency photonic oscillators, and related communication and navigation systems.

Photonic systems and technologies traditionally relegated to table-top experiments are poised to make the leap from the laboratory to real-world applications through integration. Stimulated Brillouin scattering (SBS) lasers, through their unique linewidth narrowing properties, are an ideal candidate to create highly-coherent waveguide integrated sources. In particular, cascaded-order Brillouin lasers show promise for multi-line emission, low-noise microwave generation and other optical comb applications. Photonic integration of these lasers can dramatically improve their stability to environmental and mechanical disturbances, simplify their packaging, and lower cost. While single-order silicon and cascade-order chalcogenide waveguide SBS lasers have been demonstrated, these lasers produce modest emission linewidths of 10-100 kHz. We report the first demonstration of a sub-Hz (~0.7 Hz) fundamental linewidth photonic-integrated Brillouin cascaded-order laser, representing a significant advancement in the state-of-the-art in integrated waveguide SBS lasers. This laser is comprised of a bus-ring resonator fabricated using an ultra-low loss Si3N4 waveguide platform. To achieve a sub-Hz linewidth, we leverage a high-Q, large mode volume, single polarization mode resonator that produces photon generated acoustic waves without phonon guiding. This approach greatly relaxes phase matching conditions between polarization modes, and optical and acoustic modes. Using a theory for cascaded-order Brillouin laser dynamics, we determine the fundamental emission linewidth of the first Stokes order by measuring the beat-note linewidth between and the relative powers of the first and third Stokes orders. Extension to the visible and near-IR wavebands is possible due to the low optical loss from 405 nm to 2350 nm, paving the way to photonic-integrated sub-Hz lasers for visible-light applications.