Lawrence Berkeley National Laboratory

Recently, a technique for calibration of the Modulation Transfer Function (MTF) of a broad variety of metrology instrumentation has been established. The technique is based on test samples structured according to binary pseudorandom (BPR) one-dimensional sequences and two-dimensional arrays. The inherent power spectral density of BPR gratings and arrays, has a deterministic white-noise-like character that allows a direct determination of the MTF with a uniform sensitivity over the entire spatial frequency range and field-of-view of an instrument. As such, the BPR samples satisfy the characteristics of a test standard: Functionality, ease of specification and fabrication, reproducibility, and low sensitivity to manufacturing error. Here we discuss our recent developments working with support of the U.S. Department of Energy on industrialization of the technique. The goal is to develop affordable BPR test samples, application procedures, and data processing software, suitable for thorough characterization of optical interferometers and microscopes, as well as x-ray, electron (scanning and transmission), and atomic force microscopes. We report on the development of BPR array test samples optimized for advanced characterization (including the instrumental MTF and aberrations) and operation optimization of large aperture optical interferometers. We describe the sample fabrication process and tests to verify the compliance to desired surface topography. The data acquisition and analysis procedures for application of the technique for precise focusing of Fizeau interferometer are discussed in detail.