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Open Access Publications from the University of California

Smoothing EUVL mask substrate defects with an emphasis on real-world pits

  • Author(s): Mirkarimi, P.B.;
  • Spiller, E.;
  • Baker, S.L.;
  • Robinson, J.C.;
  • Salmassi, F.;
  • Park, S.-J.;
  • Liang, T.;
  • Stivers, A.R.;
  • Ultanir, E.
  • et al.
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