Skip to main content
eScholarship
Open Access Publications from the University of California

Smoothing EUVL mask substrate defects with an emphasis on real-world pits

  • Author(s): Mirkarimi, P.B.
  • Spiller, E.
  • Baker, S.L.
  • Robinson, J.C.
  • Salmassi, F.
  • Park, S.-J.
  • Liang, T.
  • Stivers, A.R.
  • Ultanir, E.
  • et al.
Main Content
Current View