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Binary pseudorandom test standard to determine the modulation transfer function of optical microscopes
- Lacey, Ian;
- Anderson, Erik H;
- Artemiev, Nikolay A;
- Babin, Sergey;
- Cabrini, Stefano;
- Calafiore, Guiseppe;
- Chan, Elaine R;
- McKinney, Wayne R;
- Peroz, Christophe;
- Takacs, Peter Z;
- Yashchuk, Valeriy V
- Editor(s): Novak, Erik;
- Trolinger, James D
Published Web Location
https://doi.org/10.1117/12.2185191Abstract
This work reports on the development of a binary pseudo-random test sample optimized to calibrate the MTF of optical microscopes. The sample consists of a number of 1-D and 2-D patterns, with different minimum sizes of spatial artifacts from 300 nm to 2 microns. We describe the mathematical background, fabrication process, data acquisition and analysis procedure to return spatial frequency based instrument calibration. We show that the developed samples satisfy the characteristics of a test standard: functionality, ease of specification and fabrication, reproducibility, and low sensitivity to manufacturing error.
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