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Open Access Publications from the University of California

Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects:

  • Author(s): Upadhyaya, Mihir;
  • Basavalingappa, Adarsh;
  • Herbol, Henry;
  • Denbeaux, Gregory;
  • Jindal, Vibhu;
  • Harris-Jones, Jenah;
  • Jang, Il-Yong;
  • Goldberg, Kenneth A.;
  • Mochi, Iacopo;
  • Marokkey, Sajan;
  • Demmerle, Wolfgang;
  • Pistor, Thomas V.
  • et al.
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