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Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects:

  • Author(s): Upadhyaya, Mihir
  • Basavalingappa, Adarsh
  • Herbol, Henry
  • Denbeaux, Gregory
  • Jindal, Vibhu
  • Harris-Jones, Jenah
  • Jang, Il-Yong
  • Goldberg, Kenneth A.
  • Mochi, Iacopo
  • Marokkey, Sajan
  • Demmerle, Wolfgang
  • Pistor, Thomas V.
  • et al.
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