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An On-chip W-Band Bowtie Slot Antenna in Silicon

Abstract

This paper presents a W-band fully on-chip bowtie slot antenna over a grounded low resistivity silicon substrate fabricated in 180 nm BiCMOS process. The measured results show that the proposed antenna could provide a wide input bandwidth covering the whole W-band. The simulated gain at 90 GHz is 1 dBi when considering several realistic effects. © 2012 IEEE.

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