Design, construction, and operation of a laboratory scale reactor for the production of high-purity, isotopically enriched bulk silicon
Skip to main content
eScholarship
Open Access Publications from the University of California

Design, construction, and operation of a laboratory scale reactor for the production of high-purity, isotopically enriched bulk silicon

  • Author(s): Ager III, J.W.
  • Beeman, J.W.
  • Hansen, W.L.
  • Haller, E.E.
  • et al.
Main Content
Current View