Naulleau, Patrick; Goldberg, Kenneth A.; Anderson, Erik H.; Bokor, Jeffrey; Gullikson, Eric; Harteneck, Bruce; Jackson, Keith; Olynick, Deirdre; Salmassi, Farhad; Baker, Sherry; Mirkarimi, Paul; Spiller, Eberhard; Walton, Chris; Zhang, Guojing

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Lithographic characterization of the printability of programmed EUV substrate defects

2002

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Lawrence Berkeley National Laboratory

Lithographic characterization of the printability of programmed EUV substrate defects