Naulleau, Patrick; Anderson, Christopher; Baclea-an, Lorie Mae; Denham, Paul; George, Simi; Goldberg, Kenneth A.; Hoef, Brian; Jones, Gideon; McClinton, Brittney; Miyakawa, Ryan; Montgomery, Warren; Rekawa, Seno; Wallow, Tom

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The SEMATECH Berkeley MET: Bridging the gap to 16-nm half pitch development

2010

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Lawrence Berkeley National Laboratory

The SEMATECH Berkeley MET: Bridging the gap to 16-nm half pitch development