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Phase measurements of EUV mask defects:

  • Author(s): Claus, Rene A.
  • Wang, Yow-Gwo
  • Wojdyla, Antoine
  • Benk, Markus P.
  • Goldberg, Kenneth A.
  • Neureuther, Andrew R.
  • Naulleau, Patrick P.
  • Waller, Laura
  • et al.
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