- Main
Flexible Soft X‐Ray Image Sensors based on Metal Halide Perovskites With High Quantum Efficiency
- Tan, Pengju;
- Liu, Tianyu;
- Yang, Yuqian;
- Chen, Yuangan;
- Guan, Yong;
- Li, Zidu;
- Yu, Shunjie;
- Yang, Xunyong;
- Xiang, Xueqiang;
- Zhao, Xiaolong;
- Li, Yu;
- Ding, Honghe;
- Wu, Xuefei;
- Fink, Zachary;
- Gao, Shuang;
- Hou, Xiaohu;
- Jiao, Xuechen;
- Zhu, Junfa;
- Fan, Fengjia;
- Yang, Shangfeng;
- Russell, Thomas P;
- Liu, Xiaosong;
- Hu, Qin;
- Long, Shibing
- et al.
Abstract
Soft X-ray imaging is a powerful tool to explore the structure of cells, probe material with nanometer resolution, and investigate the energetic phenomena in the universe. Conventional soft X-ray image sensors are by and large Si-based charge coupled devices that suffer from low frame rates, complex fabrication processes, mechanical inflexibility, and required cooling below -60 °C. Here, a soft X-ray photodiode is reported based on low-cost metal halide perovskite with comparable performance to commercial Si-based device. Nanothrough network electrode minimized the optical loss due to the shadowing of insensitive layers, while a multidimensional perovskite heterojunction is generated to reduce the photo-generated carrier loss. This strategy promoted a record quantum efficiency of 8 × 103% without cooling, several orders of magnitude greater than the previously achieved. Flexible and curved soft X-ray imaging arrays are fabricated based on this high-performance device structure, demonstrating stable soft X-ray response and sharp imaging capabilities. This work highlights the low-cost and efficient perovskite photodiode as a strong candidate for the next-generation soft X-ray image sensors.
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