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Scholarly Works (3 results)
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Article
Two-wave pattern shift aberration monitor for centrally obscured optical systems
Cain, Jason P.
;
McIntyre, Gregory
;
Naulleau, Patrick
;
Pawloski, Adam
;
La Fontaine, Bruno
;
Wood, Obert
;
Spanos, Costas
;
Neureuther, Andrew R.
Lawrence Berkeley National Laboratory
(2005)
Article
Investigation of the current resolution limits of advanced EUV resists
Naulleau, Patrick
;
Rammeloo, Clemens
;
Cain, Jason P.
;
Dean, Kim
;
Denham, Paul
;
Goldberg, Kenneth A.
;
Hoef, Brian
;
La Fontaine, Bruno
;
Pawloski, Adam
;
Larson, Carl
;
Wallraff, Greg
LBL Publications
(2005)
Article
Printing EUV Phase-shift Masks using the 0.3NA Berkeley Micro-exposure Tool
Fontaine, Bruno La
;
Pawloski, Adam R.
;
Wood, Obert R.
;
Levinson, Harry
;
Denham, Paul
;
Gullikson, Eric
;
Hoef, Brian
;
Naulleau, Patrick
;
Holfeld, Christian
;
Chovino, Christian
;
Letzkus, Florian
LBL Publications
(2005)
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